The WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encod......

WaferMax Z 直驅升降平臺 | 機械軸承直線電機直驅垂直升降平臺 | 高精度垂直校準平臺 | WaferMax Z Mechanical-Bearing Direct-Drive Lif... 產品信息

● 薄型設計，可用于空間敏感的應用
● 非接觸直接驅動
● 高重復定位精度
● 集成氣動平衡(配重)

● 與WaferMax T 輕松配置多軸應用

Superior Mechanical Design
Bearing elements are crossed-roller style for maximum smoothness and reliability. These are mounted on an optimized base and wedge assembly for stiffness and low mass/inertia, enhancing dynamic performance.

All the critical elements of the WaferMax Z were selected to operate in a 24/7 industrial environment and, unlike screw- or piezo-based vertical stages, the WaferMax Z requires no maintenance and will ensure years of trouble-free operation.

Brushless Direct-Drive
To maximize positioning performance, the WaferMax Z utilizes Aerotech’s BLMUC-series brushless, slotless linear motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax Z ideal for contoured motion, smooth scan velocity or precise incremental steps.

Accurate Positioning
Performance is assured with a precision linear encoder that results in 0.8 nm resolution. The motor and high-performance linear encoder are directly coupled to increase accuracy.

Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.